Paper
6 November 2006 A micro-adaptive optics system for aberrated laser beams compensation
Jie Li, Haiqing Chen, Tao Wu
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Abstract
Many high power lasers typically suffer from reduced beam quality due to thermally induced aberrations. Adaptive optics is an effective way to compensate the dynamic aberration. But adaptive optics has not found widespread acceptance due to the cost and complexity. It is not until recently that can the problem be readily solved with the development of microelectromechanical systems (MEMS) based on silicon micromaching technology. Calculations are performed showing the effect of Zernike aberrations on laser beam quality. We describe an adaptive optics system based on a MEMS deformable mirror to compensate the thermally induced aberrations. From the test result, it is explicit that the adaptive system can correct the thermally induced aberration of high power lasers and increase the Strehl ratio to about 80% on average.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jie Li, Haiqing Chen, and Tao Wu "A micro-adaptive optics system for aberrated laser beams compensation", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63573S (6 November 2006); https://doi.org/10.1117/12.717261
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KEYWORDS
Adaptive optics

Microelectromechanical systems

Mirrors

Transmission electron microscopy

Actuators

High power lasers

Deformable mirrors

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