6 November 2006 Vertical displacement stage with diffraction grating sensor
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To satisfy requirements of high accuracy and high resolution displacement in vertical scanning white-light interferometry and calibrations of precision sensors, a vertical displacement stage with nanometer resolution and accuracy is developed. A mechanism with flexural-hinge guided motion is utilized and driven by piezoelectric transducer for vertical micro-displacement in this stage. By lever magnifying part, the flexural-hinge mechanism implements two-grade displacement magnification, so the stage has a large range while it has high accuracy and high-resolution. Due to the hysteresis and nonlinear characteristic of PZT, the whole displacement process is monitored by a diffraction grating sensor and compensated in real-time. The deflection influences of the diffraction grating on the vertical displacement are analyzed and some experiments are carried out to verify the characteristics of the stage.
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Suping Chang, Suping Chang, Tiebang Xie, Tiebang Xie, Rong Dai, Rong Dai, } "Vertical displacement stage with diffraction grating sensor", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63573U (6 November 2006); doi: 10.1117/12.717263; https://doi.org/10.1117/12.717263

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