28 October 2006 Optimum design of a parallel micro-motion stage
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Abstract
With the development of a parallel micro motion stage, a Pseudo-Rigid-Body model is derived, and simplified as a constant Jacobian matrix, an optimization based on condition number is then made to establish structure parameters, so as to achieve kinematic performance of both workspace and resulotion as demand, while the scale of this stage is minimized. Finally the simplified model error is calculated and rational control advice is given.
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Kunpeng Song, Kunpeng Song, Penghao Hu, Penghao Hu, Wei Wang, Wei Wang, Qun Zheng, Qun Zheng, } "Optimum design of a parallel micro-motion stage", Proc. SPIE 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation, 635804 (28 October 2006); doi: 10.1117/12.717496; https://doi.org/10.1117/12.717496
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