28 October 2006 A novel dynamic displacement measure instrument and experiments with nanometer resolution
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Abstract
In this paper, a novel single grating system is constructed to test the dynamic characteristics of FTRG (Friction Twister Roller Guider). There are only several simple optical components in this instrument. To acquire high precision result in optical displacement measuring, the signal quality of moire fringes must be kept reliable and constant. And several adaptive processing methods to enhance the signal quality are provided in this system. The process platform is based on SHARC (Super Harvard Architecture Computer) DSP and flash sample technique. At last, the result of the test is listed to show the effects of the optical system and the algorithms in digital signal processor. After combining the counting algorithm, subdivision algorithm and adaptive filters together, the qualities of the signals are highly enhanced. The typical test experiments on FTRG, which are demonstrated in this article, include Long displacement without vibration and Short displacement with axial vibration. Between the two experiments, the latter is more difficult to measure displacement during a vibrating environment. All the measure results are compared with other advanced instruments. It is still precise and reliable when some other instrument out of work in axial vibrating environment.
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Shaojing Su, Xiye Guo, Hailiang Han, Dexin Zhao, "A novel dynamic displacement measure instrument and experiments with nanometer resolution", Proc. SPIE 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation, 63580I (28 October 2006); doi: 10.1117/12.717653; https://doi.org/10.1117/12.717653
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