28 October 2006 Modeling and structure parameters design of the quartz fork resonant accelerometers
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This article analyzed a kind of quartz fork resonant accelerometer. A model to calculate the resonant frequency is established. And also the sensitivity coefficient has been carried out. It can be showed that the coefficient is out of the influence of the parameter l as the length of the beam. This article also designed a set of typical structure parameters to illustrate algorism just established. Hope to be helpful for the design and the manufacture of this kind of accelerometers.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shangchun Fan, Shangchun Fan, Haihan Zhuang, Haihan Zhuang, Wei Wang, Wei Wang, Hongsheng Zhu, Hongsheng Zhu, } "Modeling and structure parameters design of the quartz fork resonant accelerometers", Proc. SPIE 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation, 63581N (28 October 2006); doi: 10.1117/12.718038; https://doi.org/10.1117/12.718038

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