All optically driven MEMS deformable device via a photodetector array

Jed Khoury; Kenneth Vaccaro; Charles L. Woods; Bahareh Haji-saeed; Sandip K. Sengupta; Craig Armiento; William D. Goodhue; John Kierstead; Andrew Davis; William Clark

doi:10.1117/12.686272

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12 October 2006 All optically driven MEMS deformable device via a photodetector array

Jed Khoury, Kenneth Vaccaro, Charles L. Woods, Bahareh Haji-saeed, Sandip K. Sengupta, Craig Armiento, William D. Goodhue, John Kierstead, Andrew Davis, William Clark

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Proceedings Volume 6368, Optoelectronic Devices: Physics, Fabrication, and Application III; 636804 (2006) https://doi.org/10.1117/12.686272
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

In this paper we demonstrate the first optical actuation of a single-pixel, deformable-mirror MEMS device through a direct cascade with a photodetector. Photovoltaic, p-i-n, and avalanche photodetectors were successfully utilized. Mirror deformations were monitored by interferometry. Deformation is quasilinear at low light intensities, and saturates at higher intensities. Actuation at picowatt light intensities has been accomplished by cascading with an avalanche photodetector. We also describe the fabrication of an integrated device consisting of an all optically addressed deformable-mirror MEMS suspended over a p-i-n photodetector. Initial demonstration of optical actuation of the deformable mirror using the newly integrated device is also presented.

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Jed Khoury, Kenneth Vaccaro, Charles L. Woods, Bahareh Haji-saeed, Sandip K. Sengupta, Craig Armiento, William D. Goodhue, John Kierstead, Andrew Davis, and William Clark "All optically driven MEMS deformable device via a photodetector array", Proc. SPIE 6368, Optoelectronic Devices: Physics, Fabrication, and Application III, 636804 (12 October 2006); https://doi.org/10.1117/12.686272

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