19 October 2006 MEMS acoustic sensor using PMN-PT single-crystal diaphragm
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Proceedings Volume 6374, Optomechatronic Actuators, Manipulation, and Systems Control; 637409 (2006) https://doi.org/10.1117/12.686007
Event: Optics East 2006, 2006, Boston, Massachusetts, United States
Abstract
The MEMS (micro-electro-mechanical systems) microphone enables the manufacturing of small mechanical components on the surface of a silicon wafer. The MEMS microphones are less susceptible to vibration because of the smaller diaphragm mass and an excellent candidate for chip-scale packaging. The PMN-PT materials itself exhibit extremely high piezoelectric coefficients and other desirable properties for an acoustic sensor. In this paper, we present a piezoelectric MEMS microphone based on PMN-PT single crystal diaphragm. The fabrication process including dry etching conditions and scale-factored prototype is presented. In particular, this paper introduces the design of a PMN-PT single crystal diaphragm with interdigitated electrode.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sung Q Lee, Sung Q Lee, Hae Jin Kim, Hae Jin Kim, Kang Ho Park, Kang Ho Park, Yong K. Hong, Yong K. Hong, Kee S. Moon, Kee S. Moon, } "MEMS acoustic sensor using PMN-PT single-crystal diaphragm", Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 637409 (19 October 2006); doi: 10.1117/12.686007; https://doi.org/10.1117/12.686007
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