19 October 2006 PMN-PT piezoelectric near field optical probe for data storage
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Proceedings Volume 6374, Optomechatronic Actuators, Manipulation, and Systems Control; 63740A (2006) https://doi.org/10.1117/12.689527
Event: Optics East 2006, 2006, Boston, Massachusetts, United States
Abstract
This paper presents the fabrication process of a novel aperture which allows near field optical data storage. We use PMN-PT ((1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3) single crystal material - a new generation oxide material known as relaxor ferroelectrics that exhibits extraordinary piezoelectric properties - to fabricate microlenes using photolithography and dry etching techniques. In this paper, we describe the fabrication processes of a PMN-PT single crystal material microlens prototype with a miniature aperture for near field optical data storage. PMN-PT has the merits of transparency for optical usage and also has a high dielectric coefficient that is suitable for actuator and sensor applications. It provides an advantage of manufacturing both aperture and actuator/sensor with the same material. The thermal reflow technique is used to fabricate photoresist microlenses on a freestanding single crystal PMN-PT film as a mask. The PMN-PT lenses are fabricated by a chemically assisted ion beam etching (CAIBE) technique. Finally the focused ion beam (FIB) machining process is used to place a miniature aperture at the apex of the microlens. We were able to successfully fabricate the 10μm PMN-PT microlenses with less than 100nm apertures. From the experimental measurement, we were able to obtain the optical throughput of 1.83x10-7 from a 50nm aperture.
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Yong K. Hong, Yong K. Hong, Sung Q Lee, Sung Q Lee, Eun Kyoung Kim, Eun Kyoung Kim, Kang Ho Park, Kang Ho Park, Kee S. Moon, Kee S. Moon, "PMN-PT piezoelectric near field optical probe for data storage", Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 63740A (19 October 2006); doi: 10.1117/12.689527; https://doi.org/10.1117/12.689527
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