18 October 2006 Tunable micro-electromechanical grating in silicon
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Proceedings Volume 6376, Optomechatronic Micro/Nano Devices and Components II; 637604 (2006) https://doi.org/10.1117/12.690773
Event: Optics East 2006, 2006, Boston, Massachusetts, United States
In this paper, we propose a solution for simple, fast and easily controllable way of tuning silicon gratings using Micro Electro Mechanical Systems (MEMS) to deform the grating itself. Basically the idea is to deform mechanically a silicon grating using electrostatic actuators, enabling pitch tuning over a large proportion (more than 50% is easily achievable with our approach). Moreover we can change the spacing of individual layers within the grating. A theoretical analysis and numerical simulations are presented and a first prototype is fabricated. Bragg gratings, springs and actuators are realized by silicon micro/nano machining on a silicon platform enabling full integration and passive alignment of all optical components. Applications range from ultra-sensitive displacement sensors, to telecommunications and biology.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yves-Alain Peter, Yves-Alain Peter, Fatou Binetou Koné, Fatou Binetou Koné, Jonathan Masson, Jonathan Masson, Nicolas Godbout, Nicolas Godbout, } "Tunable micro-electromechanical grating in silicon", Proc. SPIE 6376, Optomechatronic Micro/Nano Devices and Components II, 637604 (18 October 2006); doi: 10.1117/12.690773; https://doi.org/10.1117/12.690773

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