13 October 2006 Vision feedback in an automatic nanohandling station inside an SEM
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Proceedings Volume 6376, Optomechatronic Micro/Nano Devices and Components II; 63760B (2006); doi: 10.1117/12.684178
Event: Optics East 2006, 2006, Boston, Massachusetts, United States
Abstract
In this paper, two image processing approaches are presented, which are used to gain vision feedback for automatic nanohandling inside a Scanning Electron Microscope (SEM). The first one is a vision-based force measurement that makes use of an active contours tracking algorithm for real-time tracking of the bending line of micro- and nanoobjects. With this algorithm, it is possible to calculate applied forces in real-time with respect to the image acquisition time. This approach is validated using a piezo-resistive force sensor. In a second experiment the force applied to a Si nanowire (d ≈ 470 nm) is measured. The second visual measurement approach deals with the calculations of depth information inside an SEM by means of stereoscopic images. Therefore, a new 3D-imaging system that uses a stereo algorithm based on a biologically motivated energy model is proposed. The system provides a sharp and high density disparity map in sub-pixel accuracy and a 3D-plot for the user.
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Torsten Sievers, Marco Jähnisch, Christian Schrader, Sergej Fatikow, "Vision feedback in an automatic nanohandling station inside an SEM", Proc. SPIE 6376, Optomechatronic Micro/Nano Devices and Components II, 63760B (13 October 2006); doi: 10.1117/12.684178; https://doi.org/10.1117/12.684178
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KEYWORDS
Scanning electron microscopy

Image processing

Sensors

Nanowires

Visualization

Volume rendering

Detection and tracking algorithms

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