18 October 2006 Microassembly of 3D micromirrors as building elements for optical MEMS switching
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Proceedings Volume 6376, Optomechatronic Micro/Nano Devices and Components II; 63760C (2006); doi: 10.1117/12.686579
Event: Optics East 2006, 2006, Boston, Massachusetts, United States
Abstract
A robotic-based microassembly process has been successfully applied to the construction of a novel micro-mirror design for use in optical switching. This paper is devoted to the description of the microassembly process used to construct the 3D micro-mirror. The microassembly process is based upon the PMKIL (Passive Microgripper, Key and Inter-Lock) assembly system. Details of the assembly process include, the methodology to construct the micro-mirror, the design of the micro-mirror parts, and the design of the tools (microgrippers) that are mounted to the robot to handle the micro-parts. The results of the assembly process are presented, along with examples of prototype 3D micro-mirrors. The entire 3D micromirror consists of a novel electro-static rotary motor, onto which the 3D mirror structure is assembled. The 3D micro-mirror is used as a building element for 1 N optical switching systems and for N×M optical crossconnects.
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Nikolai Dechev, Mohamed Basha, Sujeet K. Chaudhuri, Safieddin Safavi-Naeini, "Microassembly of 3D micromirrors as building elements for optical MEMS switching", Proc. SPIE 6376, Optomechatronic Micro/Nano Devices and Components II, 63760C (18 October 2006); doi: 10.1117/12.686579; https://doi.org/10.1117/12.686579
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KEYWORDS
Micromirrors

Mirrors

Interfaces

3D image processing

Robotics

Scanning electron microscopy

Microscopes

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