2 October 2006 Laser direct writing of inorganic-organic hybrid polymeric channel waveguide for optical integrated circuits
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Proceedings Volume 6389, Active and Passive Optical Components for Communications VI; 63890B (2006) https://doi.org/10.1117/12.685279
Event: Optics East 2006, 2006, Boston, Massachusetts, United States
Abstract
A focused 375 nm laser diode module is used to fabricate optical channel waveguides on Si wafers using commercially available inorganic-organic hybrid polymers. The fabrication process eliminates all the complex steps associated with the definition of structures using photolithographic techniques, making rapid prototyping of integrated optic devices possible. Channel waveguides with smooth side-walls are fabricated and characterized. The losses, measured using cutback loss measurement method, are typically less than 1dB/cm, making them especially applicable to Si based optical interconnects applications.
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Shuping Wang, Brad Borden, Ye Li, Prakhar Goel, "Laser direct writing of inorganic-organic hybrid polymeric channel waveguide for optical integrated circuits", Proc. SPIE 6389, Active and Passive Optical Components for Communications VI, 63890B (2 October 2006); doi: 10.1117/12.685279; https://doi.org/10.1117/12.685279
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