Survey Of Surface Roughness Properties Of Synchrotron Radiation Optics

Peter Z. Takacs; Jeffrey Colbert; Eugene L. Church

doi:10.1117/12.964357

21 October 1986 Survey Of Surface Roughness Properties Of Synchrotron Radiation Optics

Peter Z. Takacs, Jeffrey Colbert, Eugene L. Church

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Proceedings Volume 0640, Grazing Incidence Optics; (1986) https://doi.org/10.1117/12.964357
Event: 1986 Technical Symposium Southeast, 1986, Orlando, United States

Abstract

Measurements of surface roughness were made on a large number of grazing incidence mirrors delivered for use at the National Synchrotron Light Source (NSLS) at Brookhaven National Laboratory. The measurements were made with a WYKO optical profiler using a 2.5X and a 10X objective and analyzed with our PROFILE code to generate an average periodogram representation for each surface. The data is presented in the form of representative profiles with all of the periodogram curves arranged according to figure type. Analysis of the periodograms allows one to compute bandwidth-limited values for RMS roughness and slope, to provide valuable feedback information to manufacturers regarding compliance with specifications, and to predict the performance of the optic at x-ray wavelengths.

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Peter Z. Takacs, Jeffrey Colbert, and Eugene L. Church "Survey Of Surface Roughness Properties Of Synchrotron Radiation Optics", Proc. SPIE 0640, Grazing Incidence Optics, (21 October 1986); https://doi.org/10.1117/12.964357

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