29 September 2006 Three-dimensional laser microfabrication
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Abstract
The mechanism of three-dimensional (3D) laser micro-structuring of dielectrics (resists, polymers, glasses, and crystals) by the direct laser writing is discussed. Overview of a light-matter interaction of a tightly-focused femtosecond pulse with dielectrics is presented. The void formation is demonstrated inside silica glass by a single picosecond pulse. Peculiarities of tight focusing and an axial superposition of two co-propagating pulses at the focus are revealed by numerical simulations. Potential of the fabricated 3D patterns in micro-photonics, micro-fluidics, and sensor applications is discussed.
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Saulius Juodkazis, Saulius Juodkazis, Hiroaki Misawa, Hiroaki Misawa, "Three-dimensional laser microfabrication", Proc. SPIE 6400, Femtosecond Phenomena and Nonlinear Optics III, 640005 (29 September 2006); doi: 10.1117/12.689384; https://doi.org/10.1117/12.689384
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