29 September 2006 Limits of ultrafast nanomachining: bubble dynamics and acoustics
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Abstract
Acoustic phenomena during nanochannel machining by fs laser pulses are found to have an unexpected strong influence on the machining efficiency. Analysis of acoustic nodes that strongly limit machining efficiency allows strategies to be identified for fabrication of high aspect ratio channels. Based on an analytic solution for node formation, it is found that increasing the speed of acoustic transmission can produce a two-fold increase in the length of the channels; this can be accomplished by maximizing the mole fraction of hydrogen in the gas phase. The model is further reinforced by the effects of varying pressure.
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Sanghyun Lee, Sanghyun Lee, E. F. Hasselbrink, E. F. Hasselbrink, Joseph L. Bull, Joseph L. Bull, Alan J. Hunt, Alan J. Hunt, } "Limits of ultrafast nanomachining: bubble dynamics and acoustics", Proc. SPIE 6400, Femtosecond Phenomena and Nonlinear Optics III, 64000B (29 September 2006); doi: 10.1117/12.689435; https://doi.org/10.1117/12.689435
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