18 January 2007 Influence of artificial metallic defects size on the surface cleaning process
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Abstract
Contamination by metallic particles has been known to reduce the laser damage threshold on high power laser optics. To simulate the presence of metallic particle on the Ligne d'Integration Laser optics, silica substrates were arti.cially polluted by square aluminum dots of 5 × 5 micron2 and 50 × 50 micron2, respectively. The metallic dot sites were irradiated by a Nd:YAG laser at 1064 nm with different fluences. The sites were analyzed by Nomarski microscopy, optic profilometry and photothermal microscopy. For both sizes of metallic dots, vaporization of metal can be observed. We study in this paper the dot size influence on the surface cleaning process and the effect of the pre-irradiation mode (1 shoot or several shots).
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J. Capoulade, J. Capoulade, J. Y. Natoli, J. Y. Natoli, S. Palmier, S. Palmier, J. L. Rullier, J. L. Rullier, I. Tovena, I. Tovena, } "Influence of artificial metallic defects size on the surface cleaning process", Proc. SPIE 6403, Laser-Induced Damage in Optical Materials: 2006, 64030G (18 January 2007); doi: 10.1117/12.695454; https://doi.org/10.1117/12.695454
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