11 January 2007 Thin metal foil sensors
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Defence Science and Technology Organisation (DSTO) is engaged in the development of sensor systems to monitor the environment and condition of high value structures and machinery. The development of this technology promises to contain escalating costs associated with the through-life support of major capital platforms, including high-rise buildings, bridges, aircraft, ships and offshore oil/gas structures. As part of this work a laser micromachining process for fabricating thin foil sensors has been developed. Laser micromachining has some inherent advantages over other processes such as metal deposition and chemical etching for the production of thin foil sensors. A chief advantage of the process is the ability to make relatively thick (100 µm) micro-patterned sensors (20 µm features) out of a very wide variety of metals with only minor changes to the process. This last feature makes feasible the manufacture of sensors out of the same material as the bulk structure that is being monitored. This paper presents results for some laser micromachined thin foil corrosion and environmental sensors and compares these with similar sensors made using different fabrication processes.
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Alan Wilson, Phillip McMahon, Richard Muscat, Oscar Vargas, Peter Vincent, "Thin metal foil sensors", Proc. SPIE 6414, Smart Structures, Devices, and Systems III, 64140C (11 January 2007); doi: 10.1117/12.696477; https://doi.org/10.1117/12.696477

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