20 December 2006 MEMS microshutter arrays for James Webb Space Telescope
Author Affiliations +
MEMS microshutter arrays (MSAs) are being developed at NASA Goddard Space Flight Center for use as an aperture array for the Near-Infrared Spectrometer (NirSpec). The instruments will be carried on the James Webb Space Telescope (JWST), the next generation of space telescope after Hubble Space Telescope retires. The microshutter arrays are designed for the selective transmission of light with high efficiency and high contrast. Arrays are close-packed silicon nitride membranes with a pixel size of 105x204 μm. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. Light shields are made on each shutter for light leak prevention to enhance optical contrast. Shutters are actuated magnetically, latched and addressed electrostatically. The shutter arrays are fabricated using MEMS technologies. Single-side indium flip chip bonding is performed to attach microshutter arrays to substrates.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mary J. Li, Tomoko Adachi, Christine Allen, Sachi Babu, Sateesh Bajikar, Michael Beamesderfer, Ruth Bradley, Kevin Denis, Nick Costen, Audrey Ewin, David Franz, Larry Hess, Ron Hu, Kamili M. Jackson, Murzy Jhabvala, Dan Kelly, Todd King, Gunther Kletetschka, Alexander Kutyrev, Barney Lynch, Timothy Miller, Harvey Moseley, Vilem Mikula, Brent Mott, Lance Oh, James T. Pontius, David Rapchun, Chris Ray, Eric Schulte, Scott Schwinger, Peter Shu, Robert Silverberg, Wayne Smith, Steve Snodgrass, David Sohl, Leroy Sparr, Rosalind Steptoe-Jackson, Valeriano Veronica, Liqin Wang, Yun Zheng, Chris Zincke, "MEMS microshutter arrays for James Webb Space Telescope", Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 64150B (20 December 2006); doi: 10.1117/12.706308; https://doi.org/10.1117/12.706308

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