20 December 2006 Aspects of laser micromachining for sensor prototyping
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Abstract
Recent advances in UV laser machining have allowed the development of accurate and rapid prototyping of micro scale devices. Two examples are presented of how modern UV laser micro machining may be applied to novel applications in engineering research and the development of state of the art micro sensors for structural health monitoring. We also show how micro device development is now a rapid process where novel procedures allowing the manual handling of work pieces may be used to make two layer laser machined devices with alignment to tens of microns.
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Phillip J. McMahon, Richard Muscat, Peter Vincent, Alan Wilson, "Aspects of laser micromachining for sensor prototyping", Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 64150S (20 December 2006); doi: 10.1117/12.696536; https://doi.org/10.1117/12.696536
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