Paper
20 December 2006 Deformable grating light modulator array for use as wavelength-selective switch
Author Affiliations +
Proceedings Volume 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III; 64151N (2006) https://doi.org/10.1117/12.713746
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2006, Adelaide, Australia
Abstract
Deformable grating light modulator (GLM) also known as grating light valve (GLV) is a Micro-Opto-Electro Mechanical System (MOEMS) grating which is originally presented as a deformable grating optical modulator by Solgaard in 19921. Since then it has been developed for uses in various applications such as in display technology, graphic printing, lithography and optical communications2, 3. We are proposing the use of deformable grating light modulators as dispersive element to de-multiplex optical input signals in a wavelength selective switching system which is originally presented by Mechels and Muller (2003) as a 1D MEMS-based wavelength switching system4. In this paper, we discuss the performance of the grating system in various geometries and designs supported with numerical simulations.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Araya Pothisorn and Alex J. Hariz "Deformable grating light modulator array for use as wavelength-selective switch", Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 64151N (20 December 2006); https://doi.org/10.1117/12.713746
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Cited by 2 scholarly publications.
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KEYWORDS
Modulators

Switching

Oxides

Switches

Silicon

Dense wavelength division multiplexing

Diffraction gratings

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