1 November 2007 Nanocrystalline Sr1-xBaxBi4Ti4O15 thin films for piezoelectric pressure sensor
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Proceedings Volume 6423, International Conference on Smart Materials and Nanotechnology in Engineering; 64230A (2007) https://doi.org/10.1117/12.779213
Event: International Conference on Smart Materials and Nanotechnology in Engineering, 2007, Harbin, China
Abstract
This paper reports the fabrication of nanocrystalline Strontium Barium Bismuth Titanate Sr1-xBaxBi4Ti4O15 (SBBT) thin films for piezoelectric pressure sensors. The SBBT films and capacitance devices with structure of Al/TiO2/SBBT/TiO2/RuO2/SiO2/Si were fabricated using sol-gel technique. Different nanostructures of the films were prepared with un-annealed condition as well as after annealing at three temperatures; 400, 500 and 600oC, in air for 2 minutes. The nanostructure of SBBT thin films have been systematically studied by XRD, AFM, SEM and dielectric constant. For the sensor device measurement, the SBBT thin film pressure sensors were tested by pneumatic loading method at pressure range between 0 to 450 kPa. It was found that the sensing properties of the films were affected by the nanostructure of the films. It was shown that there was a linear relationship between the crystallization, grains size and dielectric properties with the sensing response of the film towards pressure. The film with higher crystallization, grains size and dielectric properties demonstrates better sensitivity and repeatability compared to others. The correlation between nanostructure of the SBBT films and the piezoelectric pressure sensing properties will be discussed.
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Nor Azlian Abdul Manaf, Nor Azlian Abdul Manaf, Muhamad Mat Salleh, Muhamad Mat Salleh, Muhammad Yahaya, Muhammad Yahaya, } "Nanocrystalline Sr1-xBaxBi4Ti4O15 thin films for piezoelectric pressure sensor", Proc. SPIE 6423, International Conference on Smart Materials and Nanotechnology in Engineering, 64230A (1 November 2007); doi: 10.1117/12.779213; https://doi.org/10.1117/12.779213
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