1 November 2007 Design and characteristics of piezoelectric actuator with single neuron adaptive PID controller for the grating tiling
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Proceedings Volume 6423, International Conference on Smart Materials and Nanotechnology in Engineering; 64233E (2007) https://doi.org/10.1117/12.780060
Event: International Conference on Smart Materials and Nanotechnology in Engineering, 2007, Harbin, China
Abstract
In this paper we propose a system with the piezoelectric actuator by the single neuron adaptive PID controller for the grating tiling. Then the design of the control system as well as the control method by considering the nonlinearity of piezoelectric actuators is discussed. At last, close loop position examinations by the capacitive displacement sensor with nanometer scale precision are performed. The experimental results indicate that the system is working effectively. The system is provided with the characters of self-learning, easy calculating and adaptability as well as of a simple structure.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bin Wang, Yong Wang, Jifeng Zu, Jianqiang Zhu, "Design and characteristics of piezoelectric actuator with single neuron adaptive PID controller for the grating tiling", Proc. SPIE 6423, International Conference on Smart Materials and Nanotechnology in Engineering, 64233E (1 November 2007); doi: 10.1117/12.780060; https://doi.org/10.1117/12.780060
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