13 February 2007 Optical coherent tomography (OCT) bio-imaging using 3D scanning micromirror
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Proceedings Volume 6432, Endoscopic Microscopy II; 64320C (2007) https://doi.org/10.1117/12.702279
Event: SPIE BiOS, 2007, San Jose, California, United States
Design and development of a 3D scanning MEMS micromirror integrated miniaturized optical probe has been presented in this article. The probe is designed to be less than 2 mm in diameter and has dynamic scanning modality for larger field of view. Scanning is achieved using 3D micromirror device, which has 16º out of plane and 360º beam rotation capability. Initial target of 45º out of plane deflection is yet to be achieved. The probe being developed currently would have scanning capability in one quarter of 360º full rotation. The field of view would still be very large and multiple optical biopsies would be possible for planned cancer model diagnostics. The feasibility of using scanning mirror into an optical probe was demonstrated using scanning repeatability and OCT imaging tests. Geometrical optics and package design using silicon optical bench have been established. Miniaturized 3D scanning micromirror have been designed and developed with 16º out of plane deflection demonstrated. Probe package integration and optical testing are carried out.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Singh, Chan C. Hoe, Teo H. S. Jason, C. Nanguang, C. S. Premachandran, Collin J. R. Sheppard, M. Olivo, "Optical coherent tomography (OCT) bio-imaging using 3D scanning micromirror", Proc. SPIE 6432, Endoscopic Microscopy II, 64320C (13 February 2007); doi: 10.1117/12.702279; https://doi.org/10.1117/12.702279

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