14 February 2007 Integration and characterization of SiN nanopores for single-molecule detection in liquid-core ARROW waveguides
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Abstract
We demonstrate a method for integrating silicon nitride nanopores in liquid core Anti Resonant Reflecting Optical Waveguides (ARROW) for single molecule electrical detection and control. We use a two-step integration process when a micropore is fabricated first, paving the way for subsequent nanopore integration in the first silicon nitride layer of the ARROW structure. Nanopores with dimensions as small as 11 nm were fabricated using a Focused Ion Beam shrinking process commensurate with single particle gating of viruses, proteins, ribosomes and other biomolecules.
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M. I. Rudenko, D. Yin, M. Holmes, A. R. Hawkins, H. Schmidt, "Integration and characterization of SiN nanopores for single-molecule detection in liquid-core ARROW waveguides", Proc. SPIE 6444, Ultrasensitive and Single-Molecule Detection Technologies II, 64440L (14 February 2007); doi: 10.1117/12.700479; https://doi.org/10.1117/12.700479
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