20 February 2007 Advances in laser processing of microelectronics
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Proceedings Volume 6451, Solid State Lasers XVI: Technology and Devices; 64511K (2007); doi: 10.1117/12.713213
Event: Lasers and Applications in Science and Engineering, 2007, San Jose, California, United States
Abstract
We report on recent advances in laser processing of solar cells, flexible printed circuit boards, integrated circuit packages, and semiconductor memory in the nanosecond pulsewidth regime. These process advances are enabled by innovations in lasers and continue to drive requirements for emerging pulsed solid state and fiber lasers. Demand for increased throughput is projected to push the pulse repetition frequency for pulsed solid state sources utilized in many of these applications past 100 KHz. Ongoing device miniaturization continues to enable new applications for visible and ultraviolet pulsed laser processes, particularly for semiconductor devices. This paper summarizes the current status of these select laser processes, the laser sources that power them, and the outlook for future innovations in the field.
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B. W. Baird, R. F. Hainsey, X. Peng, P. Y. Pirogovsky, "Advances in laser processing of microelectronics", Proc. SPIE 6451, Solid State Lasers XVI: Technology and Devices, 64511K (20 February 2007); doi: 10.1117/12.713213; https://doi.org/10.1117/12.713213
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KEYWORDS
Laser processing

Semiconductor lasers

Laser drilling

Pulsed laser operation

Nd:YAG lasers

Laser systems engineering

Q switched lasers

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