20 February 2007 Advances in laser processing of microelectronics
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We report on recent advances in laser processing of solar cells, flexible printed circuit boards, integrated circuit packages, and semiconductor memory in the nanosecond pulsewidth regime. These process advances are enabled by innovations in lasers and continue to drive requirements for emerging pulsed solid state and fiber lasers. Demand for increased throughput is projected to push the pulse repetition frequency for pulsed solid state sources utilized in many of these applications past 100 KHz. Ongoing device miniaturization continues to enable new applications for visible and ultraviolet pulsed laser processes, particularly for semiconductor devices. This paper summarizes the current status of these select laser processes, the laser sources that power them, and the outlook for future innovations in the field.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B. W. Baird, R. F. Hainsey, X. Peng, P. Y. Pirogovsky, "Advances in laser processing of microelectronics", Proc. SPIE 6451, Solid State Lasers XVI: Technology and Devices, 64511K (20 February 2007); doi: 10.1117/12.713213; https://doi.org/10.1117/12.713213

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