13 March 2007 Fabrication of bio-chips by laser ablation
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A pulse laser of ultraviolet region was used to form the flow path and so on. Numbers of heat-hardening resin-films and fluoro resins were piled up a soda glass. A laser fabricated a part of the channel at the each film every lamination, and then 3-D structure micro-channel was fabricated. The channel sizes are widths of 10-400&mgr;m and depths of 30-90&mgr;m. Moreover through holes as artificial capillary-vessels are made in the resin having a minimum diameter of 5 &mgr;m and a length of 100 &mgr;m. As bloods were injected into a particle focusing micro-channel, an artificial capillary-vessel, and a micro-separator, then cell sort, erythrocyte deformability, and blood plasma were observed with a microscope, respectively.
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Yoshikazu Yoshida, Yoshikazu Yoshida, } "Fabrication of bio-chips by laser ablation", Proc. SPIE 6458, Photon Processing in Microelectronics and Photonics VI, 64580A (13 March 2007); doi: 10.1117/12.706226; https://doi.org/10.1117/12.706226


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