Femtosecond laser microfabrication of subwavelength structures in photonics

Vladimir Mezentsev; Jovana S. Petrovic; Mykhaylo Dubov; Ian Bennion; Jürgen Dreher; Holger Schmitz; Rainer Grauer

doi:10.1117/12.705800

20 March 2007 Femtosecond laser microfabrication of subwavelength structures in photonics

Vladimir Mezentsev, Jovana S. Petrovic, Mykhaylo Dubov, Ian Bennion, Jürgen Dreher, Holger Schmitz, Rainer Grauer

Author Affiliations +

Proceedings Volume 6459, Laser-based Micro- and Nanopackaging and Assembly; 64590B (2007) https://doi.org/10.1117/12.705800
Event: Lasers and Applications in Science and Engineering, 2007, San Jose, California, United States

Abstract

This paper describes experimental and numerical results of the plasma-assisted microfabrication of subwavelength structures by means of point-by point femtosecond laser inscription. It is shown that the spatio-temporal evolution of light and plasma patterns critically depend on input power. Subwavelength inscription corresponds to the supercritical propagation regimes when pulse power is several times self-focusing threshold. Experimental and numerical profiles show quantitative agreement.

Citation Download Citation

Vladimir Mezentsev, Jovana S. Petrovic, Mykhaylo Dubov, Ian Bennion, Jürgen Dreher, Holger Schmitz, and Rainer Grauer "Femtosecond laser microfabrication of subwavelength structures in photonics", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590B (20 March 2007); https://doi.org/10.1117/12.705800

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