The Laser MicroJet (LMJ): a multi-solution technology for high quality micro-machining

Tuan Anh Mai; Bernold Richerzhagen; Paul C. Snowdon; David Wood; Paul G. Maropoulos

doi:10.1117/12.701070

20 March 2007 The Laser MicroJet (LMJ): a multi-solution technology for high quality micro-machining

Tuan Anh Mai, Bernold Richerzhagen, Paul C. Snowdon, David Wood, Paul G. Maropoulos

Proceedings Volume 6459, Laser-based Micro- and Nanopackaging and Assembly; 64590P (2007) https://doi.org/10.1117/12.701070
Event: Lasers and Applications in Science and Engineering, 2007, San Jose, California, United States

Abstract

The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1]. The main issues by using these lasers are heat damages, contamination and low ablation rates. This report examines on the application of the Laser MicroJet(R) (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

Citation Download Citation

Tuan Anh Mai, Bernold Richerzhagen, Paul C. Snowdon, David Wood, and Paul G. Maropoulos "The Laser MicroJet (LMJ): a multi-solution technology for high quality micro-machining", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590P (20 March 2007); https://doi.org/10.1117/12.701070

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