7 March 2007 Replication technology as a means of implementing polymer MOEMS
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Replication technologies have been recommended as an alternative means of high volume manufacturing of the polymer optical components with low-cost. We demonstrated replication technology as a means of implementing polymer-based MOEMS. To achieve this, a polymer optical bench with embedded electric circuits was designed to integrate the functional planar-lightwave-circuit (PLC)-type optical waveguide devices; the designed packaging structures were realized using a novel fabrication process that incorporated the UV imprint technique. In addition, the detail fabrication steps of the UV imprint process were investigated. The optical bench has v-grooves for the fiber ribbon and the alignment pits for opoelectronic interconnection. The plastic mold for imprinting the designed optical bench was made of UV-transparent perfluorinated polymer material. The designed optical bench was configured on the electric-circuitpatterned silicon substrate. Flip-chip bonded polymer optical waveguide device showed not only a good electric contact but also a coupling loss of 0.9 dB at a wavelength of 1.5 ?m. It was concluded that replication technology has versatile application capabilities in manufacturing next generation optical interconnect systems.
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Jin Tae Kim, Jin Tae Kim, Jung Jin Ju, Jung Jin Ju, Suntak Park, Suntak Park, Seung Koo Park, Seung Koo Park, Min-Su Kim, Min-Su Kim, Hyung-Jong Lee, Hyung-Jong Lee, Myung-Hyun Lee, Myung-Hyun Lee, } "Replication technology as a means of implementing polymer MOEMS", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620H (7 March 2007); doi: 10.1117/12.715102; https://doi.org/10.1117/12.715102

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