Nanoscale pattern transfer for templates, NEMS, and nano-optics

Deirdre L. Olynick; J. Alexander Liddle; Bruce D. Harteneck; Stefano Cabrini; Ivo W. Rangelow

doi:10.1117/12.705033

7 March 2007 Nanoscale pattern transfer for templates, NEMS, and nano-optics

Deirdre L. Olynick, J. Alexander Liddle, Bruce D. Harteneck, Stefano Cabrini, Ivo W. Rangelow

Proceedings Volume 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII; 64620J (2007) https://doi.org/10.1117/12.705033
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Plasma etching is an enabling technology in nano optic, nanoelectronic devices, nano electro mechanical systems (NEMS) and nanoresolution templates for nano imprint lithography (NIL). With shrinkage, one must overcome significant challenges to meet the stringent profile and CD goals necessary for nanoscale applications. Using the example of Si nanoimprint template fabrication, we show how ion/sidewall/mask interactions can dominate feature profile evolution at the nanoscale and what to look for successful pattern transfer. Gas chopping or multiplexed etching, generally used for deep silicon etching, is often avoided at the nanoscale due to unacceptable undercut and sidewall scalloping. We demonstrate a multiplexed etching process in silicon with sub-5 nm amplitude scallops which is well suited for NEMS and nano optics applications and which reduces the deleterious role of ion/sidewall/mask interactions at the nanoscale.

Citation Download Citation

Deirdre L. Olynick, J. Alexander Liddle, Bruce D. Harteneck, Stefano Cabrini, and Ivo W. Rangelow "Nanoscale pattern transfer for templates, NEMS, and nano-optics", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620J (7 March 2007); https://doi.org/10.1117/12.705033

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available