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7 March 2007 Fabrication of thermally durable subwavelength periodic structures upon hybrid materials by nano-imprinting method
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Abstract
Micro- and nano-sized periodic structures are important components for wavelength dispersion, conversion, signal processing and modulation of optical signals. Thus, many micromachining technologies for the micro- and nano-sized patterns have been recently studied. Especially, nano-imprinting lithography has been rapidly developed as an attractive, low-cost alternative to photolithography and other lithographic techniques. Meanwhile, newly optimized materials for the specific nano-imprinting process have been continually required. Recently, the functionally modified inorganic-organic hybrid materials were found to have a highly efficient thermal curability, a high optical transparency in the visible and near infrared wavelength regions, and excellent mechanical and thermal properties once fully cured. In this study, we could successfully fabricate the micro- and nano-sized periodic structures by thermal nanoimprinting process using our original functionally modified hybrid materials. The fabricated structures exhibited the excellent uniformity and surface smoothness through a large imprinted area. In addition, the optical transparency is more than 90% within visible and near infrared wavelength regions. These nano-imprinted periodic structures showed the highly thermal durability without any structural changes for 2 hours at 300°C, which is much better than commercially available organic imprinting materials. Thus, these nano-imprinted sub-wavelength periodic structures using our original hybrid materials have great potentials for several applications to micro- and nano-photonic devices.
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Dong Jun Kang, Byeong-Soo Bae, and Junji Nishii "Fabrication of thermally durable subwavelength periodic structures upon hybrid materials by nano-imprinting method", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 646219 (7 March 2007); https://doi.org/10.1117/12.699667
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