Translator Disclaimer
7 March 2007 Fabrication of thermally durable subwavelength periodic structures upon hybrid materials by nano-imprinting method
Author Affiliations +
Micro- and nano-sized periodic structures are important components for wavelength dispersion, conversion, signal processing and modulation of optical signals. Thus, many micromachining technologies for the micro- and nano-sized patterns have been recently studied. Especially, nano-imprinting lithography has been rapidly developed as an attractive, low-cost alternative to photolithography and other lithographic techniques. Meanwhile, newly optimized materials for the specific nano-imprinting process have been continually required. Recently, the functionally modified inorganic-organic hybrid materials were found to have a highly efficient thermal curability, a high optical transparency in the visible and near infrared wavelength regions, and excellent mechanical and thermal properties once fully cured. In this study, we could successfully fabricate the micro- and nano-sized periodic structures by thermal nanoimprinting process using our original functionally modified hybrid materials. The fabricated structures exhibited the excellent uniformity and surface smoothness through a large imprinted area. In addition, the optical transparency is more than 90% within visible and near infrared wavelength regions. These nano-imprinted periodic structures showed the highly thermal durability without any structural changes for 2 hours at 300°C, which is much better than commercially available organic imprinting materials. Thus, these nano-imprinted sub-wavelength periodic structures using our original hybrid materials have great potentials for several applications to micro- and nano-photonic devices.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dong Jun Kang, Byeong-Soo Bae, and Junji Nishii "Fabrication of thermally durable subwavelength periodic structures upon hybrid materials by nano-imprinting method", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 646219 (7 March 2007);


Imaging data integration for painting diagnostics
Proceedings of SPIE (June 30 2009)
Overview of ASTER design concept
Proceedings of SPIE (July 31 1991)
Parameter extraction for 157-nm photoresists
Proceedings of SPIE (July 23 2002)

Back to Top