Micro- and nano-sized periodic structures are important components for wavelength dispersion, conversion, signal
processing and modulation of optical signals. Thus, many micromachining technologies for the micro- and nano-sized
patterns have been recently studied. Especially, nano-imprinting lithography has been rapidly developed as an attractive,
low-cost alternative to photolithography and other lithographic techniques. Meanwhile, newly optimized materials for
the specific nano-imprinting process have been continually required.
Recently, the functionally modified inorganic-organic hybrid materials were found to have a highly efficient thermal
curability, a high optical transparency in the visible and near infrared wavelength regions, and excellent mechanical and
thermal properties once fully cured.
In this study, we could successfully fabricate the micro- and nano-sized periodic structures by thermal nanoimprinting
process using our original functionally modified hybrid materials. The fabricated structures exhibited the
excellent uniformity and surface smoothness through a large imprinted area. In addition, the optical transparency is
more than 90% within visible and near infrared wavelength regions. These nano-imprinted periodic structures showed
the highly thermal durability without any structural changes for 2 hours at 300°C, which is much better than
commercially available organic imprinting materials. Thus, these nano-imprinted sub-wavelength periodic structures
using our original hybrid materials have great potentials for several applications to micro- and nano-photonic devices.