Recent advances in MEMS technology have led to development of a multitude of new devices. However applications of
these devices are hampered by challenges posed by limited understanding of their reliability particularly the impacts of
long-term storage. Current trend in micro/nanosystems is to produce ever smaller, lighter, and more capable devices in
greater quantities and at a lower cost than ever before. In addition, the finished products have to operate at very low
power and in very adverse conditions while assuring durable and reliable performance. Some of the new devices are
being developed to function at high operational speeds, others to make accurate measurements of operating conditions in
specific processes. Regardless of their application, the devices have to be reliable while in use. MEMS reliability,
however, is application specific and, usually, has to be developed on a case by case basis. This paper presents a hybrid
approach/methodology particularly suitable to quantitative studies of various aspects in MEMS reliability assessment.
The presentation is illustrated with selected examples representing an initial study of reliability of specific MEMS. By
quantitatively characterizing performance of MEMS, under different operating conditions, we can make specific
suggestions for their improvements. Then, using the hybrid approach/methodology, we can verify the effect of these
improvements. In this way, we can develop better understanding of functional characteristics of MEMS sensors, which
will ensure that these sensors are operated at maximum performance, are durable, and are reliable.