Coated Tips for Scanning Thermal Microscopy

Nicolás Duarte; Peter Eklund; Srinivas Tadigadapa

doi:10.1117/12.702157

12 February 2007 Coated tips for scanning thermal microscopy

Nicolás Duarte, Peter Eklund, Srinivas Tadigadapa

Proceedings Volume 6464, MEMS/MOEMS Components and Their Applications IV; 646408 (2007) https://doi.org/10.1117/12.702157
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

This paper presents a unique solution to the inaccuracies produced when thermally scanning various micro and nano systems with thermistor tip scanning thermal microscopy (SThM). Under dc measurement conditions, thermistor tip heating induces perturbations in the measured system that change with sample properties like material and geometry. As a result, normal SThM scans are affected by errors that make it difficult to interpret the 2D-temperature scans of such systems. By coating the SThM tips with a thermally resistive material (100nm of Si₃N₄) we demonstrate that the temperature dependence on sample material and geometry can be minimized and the tip heating problem can be mitigated to that of a constant temperature offset problem. Included are the first images of coated scanning thermal microscopy (C-SThM) as well as a lumped model that describes the basis of the improvement seen in the thermal images.

Citation Download Citation

Nicolás Duarte, Peter Eklund, and Srinivas Tadigadapa "Coated tips for scanning thermal microscopy", Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 646408 (12 February 2007); https://doi.org/10.1117/12.702157

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available