Integrated nanomechanical motion detection by means of optical evanescent wave coupling

I. De Vlaminck; J. Roels; D. Taillaert; D. Van Thourhout; L. Lagae; R. Baets; G. Borghs

doi:10.1117/12.700374

12 February 2007 Integrated nanomechanical motion detection by means of optical evanescent wave coupling

I. De Vlaminck, J. Roels, D. Taillaert, D. Van Thourhout, L. Lagae, R. Baets, G. Borghs

Proceedings Volume 6464, MEMS/MOEMS Components and Their Applications IV; 64640E (2007) https://doi.org/10.1117/12.700374
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

A central problem in the development of mechanical devices and systems is accurate and fast motion sensing. We demonstrate an integrated and near-field optical displacement sensing technique based on optical evanescent wave coupling. Exploiting the strong dependence of waveguide-to-waveguide coupling to changes in separation between waveguides we were able to detect in- and out-of-plane mechanical motions of a mechanical resonator. We have studied the sensitivity of the proposed motion detection technique with a 3D full-vectorial mode solver and make predictions on the attainable displacement detection limits based on a noise analysis. This work demonstrates both the feasibility and the effectiveness of integrating nanomechanical devices with photonic circuitry.

Citation Download Citation

I. De Vlaminck, J. Roels, D. Taillaert, D. Van Thourhout, L. Lagae, R. Baets, and G. Borghs "Integrated nanomechanical motion detection by means of optical evanescent wave coupling", Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 64640E (12 February 2007); https://doi.org/10.1117/12.700374

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KEYWORDS

Waveguides

Resonators

Near field optics

Motion detection

Integrated optics

Photodetectors

Silicon

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