12 February 2007 Integrated nanomechanical motion detection by means of optical evanescent wave coupling
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Abstract
A central problem in the development of mechanical devices and systems is accurate and fast motion sensing. We demonstrate an integrated and near-field optical displacement sensing technique based on optical evanescent wave coupling. Exploiting the strong dependence of waveguide-to-waveguide coupling to changes in separation between waveguides we were able to detect in- and out-of-plane mechanical motions of a mechanical resonator. We have studied the sensitivity of the proposed motion detection technique with a 3D full-vectorial mode solver and make predictions on the attainable displacement detection limits based on a noise analysis. This work demonstrates both the feasibility and the effectiveness of integrating nanomechanical devices with photonic circuitry.
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I. De Vlaminck, I. De Vlaminck, J. Roels, J. Roels, D. Taillaert, D. Taillaert, D. Van Thourhout, D. Van Thourhout, L. Lagae, L. Lagae, R. Baets, R. Baets, G. Borghs, G. Borghs, } "Integrated nanomechanical motion detection by means of optical evanescent wave coupling", Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 64640E (12 February 2007); doi: 10.1117/12.700374; https://doi.org/10.1117/12.700374
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