12 February 2007 Integrated nanomechanical motion detection by means of optical evanescent wave coupling
Author Affiliations +
A central problem in the development of mechanical devices and systems is accurate and fast motion sensing. We demonstrate an integrated and near-field optical displacement sensing technique based on optical evanescent wave coupling. Exploiting the strong dependence of waveguide-to-waveguide coupling to changes in separation between waveguides we were able to detect in- and out-of-plane mechanical motions of a mechanical resonator. We have studied the sensitivity of the proposed motion detection technique with a 3D full-vectorial mode solver and make predictions on the attainable displacement detection limits based on a noise analysis. This work demonstrates both the feasibility and the effectiveness of integrating nanomechanical devices with photonic circuitry.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
I. De Vlaminck, I. De Vlaminck, J. Roels, J. Roels, D. Taillaert, D. Taillaert, D. Van Thourhout, D. Van Thourhout, L. Lagae, L. Lagae, R. Baets, R. Baets, G. Borghs, G. Borghs, } "Integrated nanomechanical motion detection by means of optical evanescent wave coupling", Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 64640E (12 February 2007); doi: 10.1117/12.700374; https://doi.org/10.1117/12.700374

Back to Top