Set-up of a biological monitoring module realized in LTCC technology

Walter Smetana; Bruno Balluch; Günther Stangl; Erwin Gaubitzer; Michael Edetsberger; Gottfried Köhler

doi:10.1117/12.701940

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22 January 2007 Set-up of a biological monitoring module realized in LTCC technology

Walter Smetana, Bruno Balluch, Günther Stangl, Erwin Gaubitzer, Michael Edetsberger, Gottfried Köhler

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Proceedings Volume 6465, Microfluidics, BioMEMS, and Medical Microsystems V; 646509 (2007) https://doi.org/10.1117/12.701940
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Low temperature co-fired ceramic (LTCC) technology was originally developed for the realization of multilayer circuits of high reliability. It was recognized that LTCC technology is a valuable development in thick film technology, which launches new application areas as it becomes evident that complex three-dimensional structures can easily be realized. When considered for biological applications ceramic tape material must be proved with regard to its biocompatibility. A selection of appropriate commercially available ceramic tapes has been characterized in respect to the influence on proliferation, viability and adherence of cells. Aspects of realization of a complex biological monitoring module comprising a three-dimensional network of channels and cavities will be demonstrated.

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Walter Smetana, Bruno Balluch, Günther Stangl, Erwin Gaubitzer, Michael Edetsberger, and Gottfried Köhler "Set-up of a biological monitoring module realized in LTCC technology", Proc. SPIE 6465, Microfluidics, BioMEMS, and Medical Microsystems V, 646509 (22 January 2007); https://doi.org/10.1117/12.701940

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