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22 January 2007 Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope
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Abstract
This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm x 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.
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Hyejun Ra, Wibool Piyawattanametha, Yoshihiro Taguchi, and Olav Solgaard "Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660G (22 January 2007); https://doi.org/10.1117/12.711560
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