22 January 2007 A new micro laser camera
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Abstract
A new two-dimensional and resonantly driven scanning micro mirror has been simulated, fabricated and characterized. Features are a small chip size of 2900 μm x 2350 μm with a frame oscillating at frequencies in the range of 1 kHz. The frame carries a mirror of 500 μm diameter in a gimbal mounting oscillating at frequencies in the range of 16 kHz. The characteristic mechanical amplitudes are 21o and 28o respectively. Voltages of 60 V and less than 140 V were necessary to accomplish this. Much higher amplitudes have been achieved on the mirror axis without breaking the torsion bars. Initial difficulties in realizing the high amplitudes have been overcome by improving the geometry of the suspension. The initial design is presented as well as the measurement results of the initial and improved design. The device was used to develop a micro laser camera with high depth of focus. Pictures taken with the system are presented revealing the excellent resolution.
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Christian Drabe, Christian Drabe, Richard James, Richard James, Thomas Klose, Thomas Klose, Alexander Wolter, Alexander Wolter, Harald Schenk, Harald Schenk, Hubert Lakner, Hubert Lakner, "A new micro laser camera", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660I (22 January 2007); doi: 10.1117/12.700360; https://doi.org/10.1117/12.700360
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