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MEMS development for astronomical instrumentation at the Lick Observatory Laboratory for Adaptive Optics
Adaptive scanning optical microscope (ASOM): large field of view and high resolution imaging using a MEMS deformable mirror
MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and OCT imaging instruments
Large-stroke self-aligned vertical comb drive actuated micromirror arrays for adaptive optics applications