9 February 2007 Piston-tip-tilt positioning of a segmented MEMS deformable mirror
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Results of a calibrated open-loop controller for piston/tip/tilt positioning of a segmented deformable mirror are presented. The controller is based on a fit of a 3rd-order polynomial that maps desired positions to the electrode voltages that actuate the segments. In addition to mapping positions to voltages, the controller limits positions to within the reachable space of the device. Experimental testing shows that over nearly the entire 5 &mgr;m of stroke and ±4 mrad of tip and tilt operating range, the controller positions segments to better than 30 nm rms of surface-figure error.
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Michael A. Helmbrecht, Michael A. Helmbrecht, Thor Juneau, Thor Juneau, } "Piston-tip-tilt positioning of a segmented MEMS deformable mirror", Proc. SPIE 6467, MEMS Adaptive Optics, 64670M (9 February 2007); doi: 10.1117/12.702653; https://doi.org/10.1117/12.702653

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