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14 February 2007 Compact large-stroke piston tip-tilt actuator and mirror
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Abstract
Devices based on SOI technology are subject to bow due to residual stress induced by the buried oxide. We have designed and fabricated a compact tunable piston tip-tilt mirror device in which the shape and the arrangement of the suspension beams result in both a reduced stress in the suspension beams and an optically flat mirror. The piston tip-tilt mirror is characterized by an accurate vertical displacement of up to 18 &mgr;m @ 80 V with good repeatability, and a tip-tilt of up to 2 mrad @ 50 V.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
W. Noell, A. Hugi, T. Overstolz, R. Stanley, S. Waldis, and N. F. de Rooij "Compact large-stroke piston tip-tilt actuator and mirror", Proc. SPIE 6467, MEMS Adaptive Optics, 64670Q (14 February 2007); https://doi.org/10.1117/12.698937
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