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7 February 2007 Electro-optic polymer microring resonators made by photobleaching
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Abstract
Photobleaching was used for the fabrication of electro-optic polymer microrings resonators. All the device parameters were theoretically optimized. The photobleaching mask was made using e-beam lithography. UV exposure through the mask defined the pattern in the polymer by an irreversible change of the material properties and decrease of the refractive index. Waveguide coupled microring resonators have shown 15 dB resonance contrast and low total insertion loss of 9 dB, most of which was mainly due to fiber coupling in and out of the chip.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anna Pyayt, Jun Zhou, Antao Chen, Jingdong Luo, Steven Hau, Alex Jen, and Larry Dalton "Electro-optic polymer microring resonators made by photobleaching", Proc. SPIE 6470, Organic Photonic Materials and Devices IX, 64700Y (7 February 2007); https://doi.org/10.1117/12.699594
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