Nanoheteroepitaxy of GaN on columnar SiC substrates by metalorganic chemical vapor deposition

Yi Fu; Ü. Özgür; Q. Fan; N. Biyikli; S. Chevtchenko; H. Morkoç; You Ke; Robert Devaty; W. J. Choyke; C. K. Inoki; T. S. Kuan

doi:10.1117/12.706889

8 February 2007 Nanoheteroepitaxy of GaN on columnar SiC substrates by metalorganic chemical vapor deposition

Yi Fu, Ü. Özgür, Q. Fan, N. Biyikli, S. Chevtchenko, H. Morkoç, You Ke, Robert Devaty, W. J. Choyke, C. K. Inoki, T. S. Kuan

Author Affiliations +

Proceedings Volume 6473, Gallium Nitride Materials and Devices II; 64731K (2007) https://doi.org/10.1117/12.706889
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States

Abstract

Preliminary results on nanoheteroepitaxy of GaN on silicon face (Si-face) and carbon face (C-face) nano-columnar SiC (CSC) by metalorganic chemical vapor deposition (MOCVD) are reported. The CSC substrates are fabricated from standard SiC wafers by photo-enhanced electrochemical etching, with typical diameter of pores around 20nm. Noticeable reduction of threading dislocations (TDs) in GaN is realized on the CSC substrates. On the C-face CSC, GaN nuclei have an inverted pyramidal shape which contains high density of stacking faults (SFs). These SFs block possible extension of TDs into upper portion of the layer. On the Si-face CSC, TDs are annihilated by forming nanoscale TD half-loops over the surface pores. These nanoscale TD loops confine the defective layer in GaN to within ~50 nm thickness from the GaN/CSC interface. High density (~5x10⁸ cm^-2) of remnant TDs still presents in GaN grown on CSC, chiefly because the surface damages on CSC were not properly removed before growth.

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Yi Fu, Ü. Özgür, Q. Fan, N. Biyikli, S. Chevtchenko, H. Morkoç, You Ke, Robert Devaty, W. J. Choyke, C. K. Inoki, and T. S. Kuan "Nanoheteroepitaxy of GaN on columnar SiC substrates by metalorganic chemical vapor deposition", Proc. SPIE 6473, Gallium Nitride Materials and Devices II, 64731K (8 February 2007); https://doi.org/10.1117/12.706889

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