Low resistivity and high transparent ITO, RuOx (1⩽x⩽2) and TiW ohmic contacts to ZnO film
was achieved by RF sputter system and annealing treatment. The transmittance of 450°C-annealing
ITO, 650°C-annealing Ru and 200°C-annealing TiW were measured to be 94, 68 and 61%, with
wavelength of 400 nm, respectively. Moreover, the specific contact resistance of 450°C-annealing
ITO, 650°C-annealing Ru and 200°C-annealing TiW on ZnO films was estimated to be 2.15x10-4,
2.72x10-4 and 2.56x10-4 &OHgr;-cm2 by circular transmission line model (CTLM) method, respectively.
In the study of ZnO-based photodiodes, high quality and vertical well-aligned ZnO nanowires were
selectively grown on ZnO:Ga/glass templates by vapor-liquid-solid method. Ultraviolet (UV)
photodetectors using these vertical ZnO nanowires were also fabricated by spin-on-glass technology.
With 2 V applied bias, it was found that dark current density of the fabricated device was only 3.8x10-9 A/cm2. It was also found that UV-to-visible rejection ratio and quantum efficiency of the
fabricated ZnO nanowire photodetectors were more than 1000 and 12.6%, respectively.