Enhancement of gas response of ZnO micro-nano structured films through plasma treatment

Jean-Jacques Delaunay; Kazumasa Yanagisawa; Toshiki Nishino; Ichiro Yamada

doi:10.1117/12.699268

20 February 2007 Enhancement of gas response of ZnO micro-nano structured films through plasma treatment

Jean-Jacques Delaunay, Kazumasa Yanagisawa, Toshiki Nishino, Ichiro Yamada

Proceedings Volume 6474, Zinc Oxide Materials and Devices II; 64741G (2007) https://doi.org/10.1117/12.699268
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States

Abstract

Films of ZnO micro-nano structures were deposited on quartz substrates and subsequently plasma treated in O₂, N₂ and CF₄. It was found that exposure to oxygen plasma enhanced gas response to ethanol vapor of the ZnO films by a factor 2. The effect of surface plasma treatments on the gas response of the ZnO films was discussed in reference to surface morphology observed by high-magnification SEM and surface chemical state determined by XPS. SEM observation revealed that O₂ plasma treatment induced less surface roughening than N₂ and CF₄ plasmas, in agreement with the view that O₂ plasma should reduce preferential sputtering. Deconvolution of the O 1s X-ray photoelectron peak indicated an increase in the Zn-O bond surface density relatively to O-H bond density for the O₂ plasma treated surface, whereas the O-H bond surface density was increased relatively to the Zn-O bond density for the N₂ and CF₄ plasma treated films. The O₂ plasma was found to partially clean the surface from hydroxyl groups and to expose more Zn cations, which might have caused the enhancement of sensor response by increasing the density of active sites for oxidation/reduction reactions.

Citation Download Citation

Jean-Jacques Delaunay, Kazumasa Yanagisawa, Toshiki Nishino, and Ichiro Yamada "Enhancement of gas response of ZnO micro-nano structured films through plasma treatment", Proc. SPIE 6474, Zinc Oxide Materials and Devices II, 64741G (20 February 2007); https://doi.org/10.1117/12.699268

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