9 February 2007 Nanofluidic tuning of photonic crystal circuits
Author Affiliations +
By integrating soft-lithography-based nanofluidics with silicon nanophotonics, we demonstrate dynamic, liquid-based addressing and high &Dgr;n/n (~0.1) refractive index modulation of individual features within photonic structures at subwavelength length scales. We show ultracompact tunable spectral filtering through nanofluidic targeting of a single row of holes within a planar photonic crystal. We accomplished this with an optofluidic integration architecture comprising a nanophotonic layer, a nanofluidic delivery structure, and a microfluidic control engine. Variants of this technique could enable dynamic reconfiguration of photonic circuits, selective introduction of optical nonlinearities, or delivery of single molecules into resonant cavities for biodetection.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David Erickson, David Erickson, Troy Rockwood, Troy Rockwood, Teresa Emery, Teresa Emery, Axel Scherer, Axel Scherer, Demetri Psaltis, Demetri Psaltis, } "Nanofluidic tuning of photonic crystal circuits", Proc. SPIE 6475, Integrated Optics: Devices, Materials, and Technologies XI, 647513 (9 February 2007); doi: 10.1117/12.711490; https://doi.org/10.1117/12.711490


Microextractor controlled
Proceedings of SPIE (June 30 2005)
Rapid fabrication of hot embossing tools using PDMS
Proceedings of SPIE (January 16 2003)
Dielectrophoretic chip with bulk silicon electrodes
Proceedings of SPIE (February 15 2005)
Status of EUVL mask development in Europe
Proceedings of SPIE (June 27 2005)

Back to Top