9 February 2007 Guided-mode resonance device constructed with membrane structure: theoretical analysis and experimental demonstration
Author Affiliations +
Proceedings Volume 6477, Silicon Photonics II; 64770K (2007); doi: 10.1117/12.700103
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States
Abstract
In this paper, the guide-mode resonance (GMR) devices based on a suspended membrane structure is designed and experimentally demonstrated. The presented membrane structure possesses a simple structure for resonance excitation and is capable of improving the spectral response. The results of resonance excitation, improving the sideband and low oscillatory spectrum are presented. Due to the utilization of silicon-based materials, the proposed filter is also potential candidates to be integrated with other optoelectronic devices for further applications.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jenq-Yang Chang, Mount-Learn Wu, Che-Lung Hsu, Yun-Chih Lee, Ya-Lun Tsai, Hsiao-Chin Lan, Yung-Chih Liu, Zong-Ru Tu, "Guided-mode resonance device constructed with membrane structure: theoretical analysis and experimental demonstration", Proc. SPIE 6477, Silicon Photonics II, 64770K (9 February 2007); doi: 10.1117/12.700103; https://doi.org/10.1117/12.700103
PROCEEDINGS
8 PAGES


SHARE
KEYWORDS
Silicon

Cladding

Optoelectronic devices

Waveguides

Optical design

Solids

Microelectromechanical systems

Back to Top