Advances in fully CMOS integrated photonic devices

Jurgen Michel; J. F. Liu; D. H. Ahn; D. Sparacin; R. Sun; C. Y. Hong; W. P. Giziewicz; M. Beals; L. C. Kimerling; A. Kopa; A. B. Apsel; M. S. Rasras; D. M. Gill; S. S. Patel; K. Y. Tu; Y. K. Chen; A. E. White; A. Pomerene; D. Carothers; M. J. Grove

doi:10.1117/12.706586

9 February 2007 Advances in fully CMOS integrated photonic devices

Jurgen Michel, J. F. Liu, D. H. Ahn, D. Sparacin, R. Sun, C. Y. Hong, W. P. Giziewicz, M. Beals, L. C. Kimerling, A. Kopa, A. B. Apsel, M. S. Rasras, D. M. Gill, S. S. Patel, K. Y. Tu, Y. K. Chen, A. E. White, A. Pomerene, D. Carothers, M. J. Grove

Author Affiliations +

Proceedings Volume 6477, Silicon Photonics II; 64770P (2007) https://doi.org/10.1117/12.706586
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States

Abstract

The complete integration of photonic devices into a CMOS process flow will enable low cost photonic functionality within electronic circuits. BAE Systems, Lucent Technologies, Massachusetts Institute of Technology, Cornell University, and Applied Wave Research are participating in a high payoff research and development program for the Microsystems Technology Office (MTO) of DARPA. The goal of the program is the development of technologies and design tools necessary to fabricate an application specific, electronic-photonic integrated circuit (AS-EPIC). The first phase of the program was dedicated to photonics device designs, CMOS process flow integration, and basic electronic functionality. We will present the latest results on the performance of waveguide integrated detectors, and tunable optical filters.

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Jurgen Michel, J. F. Liu, D. H. Ahn, D. Sparacin, R. Sun, C. Y. Hong, W. P. Giziewicz, M. Beals, L. C. Kimerling, A. Kopa, A. B. Apsel, M. S. Rasras, D. M. Gill, S. S. Patel, K. Y. Tu, Y. K. Chen, A. E. White, A. Pomerene, D. Carothers, and M. J. Grove "Advances in fully CMOS integrated photonic devices", Proc. SPIE 6477, Silicon Photonics II, 64770P (9 February 2007); https://doi.org/10.1117/12.706586

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