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9 February 2007 Hybrid photonic crystal microcavity switches on SOI
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Abstract
We report the development and characterization of 2-D photonic crystal (PC) microcavity devices on silicon on insulator. The transmission of light through a 2-D PC microcavity near resonance can be switched on and off by modulating the refractive index of the PC. Because silicon has poor electro-optical properties, it is advantageous to insert electro-optic materials inside the air holes. In this work, we report the design, fabrication, and characterization of such hybrid PC microcavity switches using liquid crystals as the electro-optic material. In addition, we demonstrate an electrode geometry that eliminates electric field screening by the more conducting silicon host, and thus enables switching. fabrication.
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Sean P. Anderson, Mikhail Haurylau, Jidong Zhang, and Philippe M. Fauchet "Hybrid photonic crystal microcavity switches on SOI", Proc. SPIE 6477, Silicon Photonics II, 647712 (9 February 2007); https://doi.org/10.1117/12.707905
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