You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
9 February 2007Si based waveguide and surface plasmon sensors
Silicon-on-Insulator (SOI) is a very interesting material system for highly integrated photonic circuits. The high
refractive index contrast allows photonic waveguides and waveguide components with submicron dimensions
to guide, bend and control light on a very small scale so that various functions can be integrated on a chip.
Moreover, SOI offers a flexible platform for integration with surface plasmon based components which in turn
allows for even higher levels of miniaturization. Key property of both waveguide types is the mode distribution
of the guided modes: a high portion of the light is concentrated outside of the core material, thus making them
suitable for sensitive detection of environmental changes.
We illustrate chemical and label-free molecular biosensing with SOI microring resonator components. In
these microring resonator sensors, the shift of the resonance wavelength is measured. A ring of radius 5 micron
is capable of detecting specific biomolecular interaction between the high affinity protein couple avidin/biotin
down to a few ng/ml avidin concentration. We describe the integration of surface plasmon waveguides with SOI
waveguides and discuss the principle of a highly sensitive and compact surface plasmon interferometric sensor
suitable for biosensing. The device is two orders of magnitude smaller than current integrated SPR sensors, and
has a highly customizable behavior. We obtain a theoretical limit of detection of 10-6 RIU for a component of
length 10 microns. We address material issues and transduction principles for these types of sensors.
Besides in chemical sensors, the SOI microring resonators can also be used in physical sensors. We demonstrate
a strain sensor in which the shift of the resonance wavelength is caused by mechanical strain. We have
experimentally characterized the strain sensors by performing a bending test
The alert did not successfully save. Please try again later.
Peter Debackere, Dirk Taillaert, Katrien De Vos, Stijn Scheerlinck, Peter Bienstman, Roel Baets, "Si based waveguide and surface plasmon sensors," Proc. SPIE 6477, Silicon Photonics II, 647719 (9 February 2007); https://doi.org/10.1117/12.702040